Development of Air Bearing Stage Using Flexure for Yaw Motion Compensation

This paper presents an air bearing stage that uses flexure for yaw motion compensation. The proposed realizes in three degrees of freedom (DOF), which are the X, Y, and Θz directions. To work with as rotational stage, we applied a consisting four bar linkages. from previous study is to compensate error has limitation increasing structural stiffness due stiffness. In this study, propose combination new structure ensure high very low at same time. Modeling design optimization were performed apply adequate stage. Experiments carried out verify compensation performance maximum 0.86 arcsec during scanning 48 ms settling time, while stepping improved by 34.2% compared study.